研究生前沿讲座

地点:微电子学楼B213

时间:328日下午300400

 

Emerging micro/nanopatterning techniques for MEMS/NEMS

 Prof. Dr. Juergen Brugger

 Microsystems Laboratory

Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland

http://lmis1.epfl.ch

 

Structuring silicon and related materials at micro and nanometer scale is typically done with sophisticated lithography and etching methods. For advanced micro- and nanosystems (MEMS/NEMS) more functional materials (complex oxides, nanocrystal polymer blends, and bio-molecules) need to be integrated at multiple length-scales (from nm to mm) and on a variety of substrates (including flexible polymer substrates). This is a grand challenge for surface patterning methods. Recently, alternatives to resist-based lithography have been developed. This talk will first give an overview of emerging nanopatterning methods and will then discuss in more detail two methods that are based on the local deposition of material, i.e. a vacuum-based high-resolution shadow mask process (stencil lithography) and a drop-on-demand dispensing of functional liquids by inkjet printing.

Stencil lithography is an emerging micro and nanopatterning technique based on the deposition of material through the apertures in a thin mechanical membrane. The technique is promising for several reasons: it requires only a single process step to define surface patterns, and thus avoids harsh steps such as resist spinning, high temperature baking, exposure to radiation and solvents. In the past, considerable advances have been made in terms of reliability, scaling (<50 nm structure width), alignment (< 1 um), reduction of pattern blurring (by corrective etch), as well as stencil stability (by mechanical rims) [1]. I will present recent advances in terms of scaling, and will show a selection of applications. The talk will also show the remaining difficulties to overcome to make it a truly reliable and scalable nanofabrication method.

Inkjet printing allows for the local drop-on-demand deposition of designer functional material with high-precision and low waste. We propose to use the method for the fabrication of polymer MEMS from the bottom up, droplet-by-droplet. SU-8 is a high viscous, non-Newtonian fluidic material that is widely used for polymer MEMS applications, either as high-aspect ratio mold or as permanent mechanical material. First results on printing SU-8 to form microlenses and optical characterization will be shown [2].

 

[1] J. Brugger et al., E-nano newsletter, (8)2007, p. 22-28, www.phantomsnet.net
[2] V. Fakhfouri et al.
Proceedings of MEMS 2008, Tucson, Arizon, USA

 

 

   

Biography of Prof. Dr. Juergen Brugger

Dr.sc. University of Neuchatel in Physical-Electronics, J.B. is director of the Microsystems Laboratory at the Faculty of Engineering Science and Technology at the Ecole Polytechnique Federale de Lausanne (EPFL) since 2001. Before that, he was Research Program Director at the MESA+ Research Institute of Nanotechnology at the University of Twente, The Netherlands, research staff member at the IBM Zurich Research Laboratory, and research fellow at the Hitachi Central Research Laboratory, Tokyo. Since 1995, he works in the field of interdisciplinary and experimental micro and nanotechnologies towards integrated micro/nanosystems with components at mesoscopic scales. In his research, he combines methods of clean-room technologies with emerging micro and nanopatterning methods, such as scanning probes, stencil lithography and inkjet printing, to be applied to the field of information technologies and life-sciences. Dr. Brugger has published over 80 peer-reviewed scientific publications since 1992. He serves as editorial board member of the IOP journal "Nanotechnology", and is regular reviewer for international journals in the field of MEMS and nanotechnology (Applied Physics Letters, Nanoletters, Advanced Functional Materials, Rev. Sci. Instr., Microelectronic Engineering, Sensors & Actuators, IEEE-MEMS, amongst others). He reviews grants from the Swiss National Science Foundation, European Commission, Volkswagen Stiftung, amongst others. Since starting at EPFL in 2001, J.B. has secured over CHF 4 million of peer reviewed research income from the European Commission, Swiss National Science Foundation, and KTI/CTI. J.B. has been a member of the IEEE-IEDM program committee, is nominated General Chair for the Eurosensors XXIII, Lausanne, 2009, and serves as European Program Chair of the IEEE-NEMS conference, Shinzen, China, 2009. His own laboratory presently consists of 4 postdocs and 6 PhD students. He is co-inventor of 8 patents and received two IBM research awards.

His private pursuits include outdoor sports such as biking and sailing as well as indoors sports such as the combination of Single Malts and Jazz music.

 

 
 
 
 

 

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